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ASTM F25/F25M-2009
Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
适用范围：<p id="s00002">1.1 This test method covers counting and sizing airborne particulate matter 5 <span class=''unicode''>x00B5;</span>m and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas.</p> <p id="s00003">1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard.</p> <p id="s00004">1.3 <span class="italic">This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory requirements prior to use.</span>
实施日期： 2009-04-01
中标分类号： C50 - 医药、卫生、劳动保护 - 卫生综合
ICS分类号： 13.040.30 - 环境和保健、安全 - 工作场所空气
标准组织： ASTM - 美国材料与试验协会标准
全文来源： WF
英文关键词： airborne particle concentration cleanroom contamination macroparticle Dust-controlled areas Electron tubes Microscopic examination--electronic materials Particulate contamination (aerospace environments) Semiconductor clean rooms
语种： 汉语
页数： 8
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