Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015); German version EN ISO 14644-2:2015

DIN EN ISO 14644-2-2016

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (ISO 14644-2:2015); German version EN ISO 14644-2:2015

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发布日期： 2016-05-01

实施日期： 2016-05-01

标准组织： DIN - 德国国家标准学会标准

全文来源： WF

英文关键词： Air pollution Air purity Air quality Airborne dust Categories of purity Classification Classification systems Clean rooms Cleanliness Clean-room technology Concentration Concentration of particles Conformity Consistency Definitions Degree of purity Determination of content Determinations Documentation Exterior areas Impurities Light scatter measurement Methods Number of particles Particle analysis Particle size Particle size distribution Particles Particulate air pollutants Pure air Purity criterion Purity test Specification Specification (approval) Surveillance (approval) Testing Verification Procedures Processes

语种： eng

页数： 0

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