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IEC 62047-21-2014

Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson''s ratio of thin film MEMS materials

发布日期: 2014-06-19

实施日期: 2014-06-19

ICS分类号: 31.080.99 - 电子学 - 其他半导体器件

标准组织: IEC - 国际电工委员会标准

全文来源: WF

英文关键词: Characteristics Components Definitions Materials Measurement Measuring techniques Microelectronics Microsystem techniques Poisson's ratio Properties Samples Semiconductor devices Single-axle System engineering Testing Testing conditions Thin films Thin-film technology Two-axles

语种: eng

页数: 26

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