请选择需要导出的字段：
适用范围：IEC/TR 62632:2013(E),which is a technical report,describes a variety of nanoscale contacts and nano-interconnects used in research and development and in present-day products. The intent of this technical report is to identify nanoscale contacts and nano-interconnects that will be common in products,to describe the state-of-the-art and to describe some key features and issues related to these contacts. In particular,the following aspects are discussed for each of the nanoscale contacts or nano-interconnects listed: - type and configuration of the nanoscale contacts and interconnects formed; - requirements of the nanoscale contacts and interconnects in products; - fabrication technologies,processes,and process controls used to make the nanoscale contacts and interconnects; - characterization techniques used to quantify nanoscale contacts and nano-interconnects; - functionality and performance of nanoscale contacts and interconnects;
知识产权声明 | 服务承诺 | 联系我们 | 客户服务 | 关于我们
网络出版服务许可证：(署)网出证(京)字第072号 互联网药品信息服务资格证书号：(京)-经营性-2016-0015 信息网络传播视听节目许可证 许可证号：0108284
万方数据标准管理系统V2.0 证书号:软著登字第11198474号
京ICP证：010071 京公网安备11010802020237号 京ICP备08100800号-1
客服电话：4000115888 客服邮箱：service@wanfangdata.com.cn 违法和不良信息举报电话：4000115888 举报邮箱：problem@wanfangdata.com.cn 举报专区：https://www.12377.cn
万方数据知识服务平台--国家科技支撑计划资助项目（编号：2006BAH03B01）©北京万方数据股份有限公司 万方数据电子出版社
