Semiconductor devices - Micro-electromechanical devices - Part 10: Micro-pillar compression test for MEMS materials
适用范围:IEC 62047-10:2011 specifies micro-pillar compression test method to measure compressive properties of MEMS materials with high accuracy, repeatability, and moderate effort of specimen fabrication. The ...
发布日期:2011-07-26 实施日期:2011-07-26
Semiconductor devices. Micro-electromechanical devices. Part 8: Strip bending test method for tensile property measurement of thin films (IEC 62047-8:2011); German version EN 62047-8:2011
Nanomanufacturing. Key control characteristics. Part 5-1:Thin-film organic/nano electronic devices. Carrier transport measurements
适用范围:IEC TS 62607-5-1:2014(E) provides a standardized sample structure for characterizing charge transport properties in thin-film organic/nano electronic devices and a format to report details of the struc...
发布日期:2014-09-03 实施日期:2014-09-03
发布日期:2014-06-19 实施日期:2014-06-19
发布日期:2013-06-27 实施日期:2013-06-27
发布日期:2014-06-19 实施日期:2014-06-19
Semiconductor devices. Micro-electromechanical devicesTest method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
发布日期:2013-10-31 实施日期:2013-10-31
Nanomanufacturing. Key control characteristics. Part 4-3:Nano-enabled electrical energy storage. Contact and coating resistivity measurements for nanomaterials
适用范围:This part of IEC 62607 provides a standardized test method for the measurement of contact and coating resistivity of nano-enabled electrode materials. This method will enable a customer to: a) decide w...
实施日期:2015-08-18
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
适用范围:IEC 62047-12:2011 specifies a method for bending fatigue testing using resonant vibration of microscale mechanical structures of MEMS (micro-electromechanical systems) and micromachines. This standard ...
发布日期:2011-09-13 实施日期:2011-09-13
Semiconductor devices. Micro-electromechanical devices. Part 10: Micro-pillar compression test for MEMS materials (IEC 62047-10:2011); German version EN 62047-10:2011
Measurement of thermal conductivity of thin films on silicon substrates
适用范围:TTA 4:2002 proposes a standard procedure for the three-omega method for measuring the thermal conductivity of a thin, electrically insulating film, on a substrate having a thermal conductivity signific...
发布日期:2002-11-01 实施日期:2002-11-01
发布日期:2015-03-05 实施日期:2015-03-05
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